F09700 - SEMI F97 - Specification for Facility Package Integration, Monitoring and Control Revision:SEMI F97-0305 - Inactive SEMI E138 — Specification for

SEMI E138 — Specification for XML Semiconductor Common Components

これらの方法は，薬品とFPD製造で実際に使用されている条件を用いてカラーフィルタの耐薬品性を試験するものである。

本スタンダードは

• Type of PSL particles

and has been appropriately leak tested and shown to meet all requirements of mechanical and physical integrity up to the point of use (POU)

F09700 - SEMI F97 - Specification for Facility Package Integration, Monitoring and Control Revision:SEMI F97-0305 - Inactive SEMI E138 — Specification forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to provide the requirements for the architecture, functionality and interfaces for facility monitoring and control systems (FMCS) and the various facility package units (FPU) to enable a